Micro Electromechanical Systems (MEMS), Practical Lab Manual, Wiley, John Wiley & Sons,Sensors,Electronics and communications engineering, MEMS devices; MEMS modeling; photolithography; soft lithography; 3D printing; X-ray diffraction; scanning electron microscopy; optical microscopy; Raman spectroscopy; energy harvesting; pollution; electrochemical impedance spectroscopy,, IEEE Press Series on Sensors, United States, en-UShttps://www.wiley.comMEMS devices; MEMS modeling; photolithography; soft lithography; 3D printing; X-ray diffraction; scanning electron microscopy; optical microscopy; Raman spectroscopy; energy harvesting; pollution; electrochemical impedance spectroscopy, [BLURB],[CITY],,books, ebooks, biblet, Book2look